| ●Features |
| ■ Very low Outgassing rate of 10-11 Pa･m3/sec m2 （less than that of stainless steel）can be obtained with low temperature baking at 150℃. |
| ■ Lightweight design (approximately 1/3 the weight of stainless steel). |
| ■ Completely non-magnetic chambers possible. |
| ■ By applying EL-processing, etc. to the Vacuum chamber surface, the chamber can be used for Ultra-High or Extreme-High Vacuum. |
| ■ Very short start-up time from a virgin chamber (1/2 that of stainless steel). |
| ■ Due to high heat conductivity, an uniform internal temperature can be obtained. |
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■Vacuum actuation durability test machine
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