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A1 Manipulators for Vacuum
Rotary Motion Feedthrough for Ultra-High Vacuum
Linear Motion Feedthrough for Ultra-High Vacuum
2-axis Rotary Motion Feedthrough for Ultra-High Vacuum
XY Manipulator for Ultra-High Vacuum
4-axis Manipulator for Ultra-High Vacuum
6-axis Manipulator for Ultra-High Vacuum
Made-to-order manipulators
A2 Vacuum flanges
CrN Surface-Treated Aluminum Alloy ICF Flange
NiP Surface-Treated Aluminum Alloy ICF Flange
Copper Alloy ICF Flange
ICF Flange Type 6-way Cross and Cube(Aluminum alloy)
ICF Flange Type 6-way Cross and Cube for Ultra-High and Extreme-High Vacuum(Copper alloy)
Gasket for ICF Flanges (use for Aluminum, copper alloy, stainless steel)
Bolts, Nuts and Washers for Mounting Aluminum Flanges
A3 Screws and Nuts for Vacuum
Screws and Nuts for Ultra-High Vacuum
Screws for Medium to Low Vacuum
Titanium Screws for Vacuum
Regular Titanium Screws
Ceramic Screws and Nuts
Screws and Nuts with Special Surface Treatment
Screws and Nuts Made of Special Materials
A4 Vacuum Equipment
SMART CLUSTER(Compact waferTransfer System)
Extreme-High Vacuum System
Vacunm-Baking System
A5 Other accessories
Viewing Port for Ultra-High Vacuum
Barium Fluoride Special Viewing Port
CCD Camera "Vacuum Eye"(TM) for Ultra-High Vacuum
Ultra-High Vacuum Stage
Mineral Insulated Cable for Vacuum
Fine Adjustment Positioning Unit for Ultra-High Vacuum
Wrenchless Nuts
Vacuum Crimp Terminals
Shutter Mechanism for Ultra-High Vacuum
Reflection High Energy Electron Diffraction Device(RHEED)
Concentric Spherical Analyzer
Electron Beam Source and Photoelectron Analyzer
Vacuum-Readiness Machining Services
Vacuum-Baking Services
Vacuum Analysis Services
Manual XY Slit
Automatic XY Slit for Atmosphere
Automatic XY Slit for Vacuum
XY Slit Mechanism for High Vacuum
4-axis Goniometer for Ultra-High Vacuum
5-axis Goniometer for High Vacuum
6-axis Goniometer for Ultra-High Vacuum
Higher Harmonic Elimination Mirror Adjuster
In-situ Polarized Light Total Reflection Fluorescent XAFS Instrument
Small-Angle dispersion camera
Wide-Angle/Small-Angle Concurrent Observation Structure Evaluation Apparatus
Tune Measuring Instrument
Vacuum Dispersion Chamber
Beam Profile Monitor
Accelerator Vacuum Beam-Ducts
Projection X-ray microscope
Gravity Measuring Device
Atomic Fountain Standards Instrument
Room-Temperature Bonder
RHEED Built-in Surface Analysis System
Vacuum Environment Test System
Manipulator for Electron Microscope
Ultra Low Temperature Stage
Mirror Manipulator for Laser Beams
Aluminum Alloy Chamber
Copper Alloy Chamber
Stainless Steel Alloy Chamber
FED Evaluation Equipment
C Optional Services
■ Vacuum Analysis Services
■ We analyze the vacuum characteristics of your parts and units.
■ Orders of all analysis scales are accepted, from only one piece to many produced on a commercial scale.
■ Specialized in the expertise of Ultra-High Vacuum equipment, we deliver tested, dependable data.
■ Helium leak tests
General leak tests are performed on Vacuum chambers by using a helium gas.
 Measurement methods  Spraying,hood,and sniffer
 Measurement range  Up to the order of 10-12Pa・m3/sec
 Standard price  12,000/sample
■ Outgassing rate measurement
The Outgassing rate of a sample per unit area can be measured in a dedicated chamber. Please use the Outgassing rate as supporting data in situations where the Ultimate Vacuum Pressure or Outgassing rate in a vacuum is a concern. Chamber Outgassing rate measurement is also available on order.
 Measurement methods  Throughput
 Background pressure  Up to 10-8Pa
 Acceptable sample sizes  Up to 80×80×20(mm)(for a regular fee)
 Standard price  300,000/sample
■ Partial pressure measurement
The components of the Outgassing from a sample can be measured in a dedicated chamber. Please use the partial pressure measurements as supporting data in situations where the emission of specific gas components in a vacuum is a concern. Chamber partial pressure measurement is also available on order.
 Measurement apparatus  Quadrupole mass spectrometer
 Mass number range  1 to 200 AMU
 Standard price  350,000/sample
In addition, Outgassing rate measurement by the buildup process and surface analyses by RHEED, AES, SEM, TEM and more can be carried out. Please inquire about other specifications.
※The amounts quoted above are typical ones. Cleaning and processing of jigs and samples would be available for separate fees.
※When tested samples and reports are delivered to a site which you determine, packaging and shipping fees may be incurred separately.
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