| ●Features |
| ■ Extreme low Outgassing rate in the region of 10-12Pa･m3/sec･m2. |
| ■ Ultra-High Vacuum of 10-8 Pa can be achieved without baking. |
| ■ Extreme-High Vacuum of 10-10 Pa can be obtained with low temperature baking at 100℃. |
| ■ Utilizes characteristics of copper such complete non-magnetism, good heat conductivity and low radiation rate. |
| ■ Very short start-up time from a virgin chamber. |
