| ●Features |
| ■ Capable of extremely low Outgassing rate of 10-11 Pa･m3/sec･m2（10-13 Torr･l/sec･cm2）less than for stainless steel using only a 150℃ low-temperature baking treatment. |
| ■ Extra light-weight design (1/3 that of stainless steel) |
| ■ The flange seal surface is protected by high-hardness CrN (ion plating). |
| ■ Flange material is A2219 (high-hardness, heat-resistant alloy). |
