■3-axis Manipulators for Ultra-High Vacuum |
●Axis configuration |
1. Linear movement in Z-axis direction |
2. Z-axis center rotation |
3. Chucking |
![](../../image/pro_a17_1g.jpg) |
![](../../image/pro_a17_1.jpg) |
■5-axis Manipulators for Ultra-High Vacuum |
●Axis configuration |
1. Linear movement in X-axis direction |
2.Linear movement in Y-axis direction |
3. Linear movement in Z-axis direction |
4. Z-axis center rotation |
5. Flapping |
|
![](../../image/pro_a17_2.jpg) |
■5-axis Manipulators with LN2 Cooling |
●Axis configuration |
1.Linear movement in X-axis direction |
2. Linear movement in Y-axis direction |
3. Linear movement in Z-axis direction |
4.X-axis center rotation |
5. Z-axis center rotation |
|
![](../../image/pro_a17_3.jpg) |
■Z-axis Stage with 100 kg Loading Capacity |
●Axis configuration |
1.Linear movement in Z-axis direction |
|
![](../../image/pro_a17_4.jpg) |
■Transfer
Robot-1 for Ultra-High Vacuum |
●Axis configuration |
1. Polar coordinates(rotation,Linear
movement in X-axis direction) |
2. Linear movement in Z-axis direction |
|
![](../../image/pro_a17_5.jpg) |
■Transfer
Robot-2 for Ultra-High Vacuum |
●Axis configuration |
1. Polar coordinates(rotation,Linear
movement in X-axis direction) |
|
![](../../image/pro_a17_6.jpg) |