| ●Features |
| ■ Capable of extremely low Outgassing rate of 10-11 Pa･m3/sec･m2 (10-13 Torrl/sec･cm2)( less than for stainless steel) using only a 150℃ low-temperature baking treatment. |
| ■ Extra lightweight design (1/3 of stainless steel weight) |
| ■ The flange seal surface is protected by high-hardness CrN (ion plating). |
| ■ Flange material is A2219 (high-hardness, heat-resistant alloy). |
