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A1 Manipulators for Vacuum
Rotary Motion Feedthrough for Ultra-High Vacuum
Linear Motion Feedthrough for Ultra-High Vacuum
2-axis Rotary Motion Feedthrough for Ultra-High Vacuum
XY Manipulator for Ultra-High Vacuum
4-axis Manipulator for Ultra-High Vacuum
6-axis Manipulator for Ultra-High Vacuum
Made-to-order manipulators
A2 Vacuum flanges
CrN Surface-Treated Aluminum Alloy ICF Flange
NiP Surface-Treated Aluminum Alloy ICF Flange
Copper Alloy ICF Flange
ICF Flange Type 6-way Cross and Cube(Aluminum alloy)
ICF Flange Type 6-way Cross and Cube for Ultra-High and Extreme-High Vacuum(Copper alloy)
Gasket for ICF Flanges (use for Aluminum, copper alloy, stainless steel)
Bolts, Nuts and Washers for Mounting Aluminum Flanges
A3 Screws and Nuts for Vacuum
Screws and Nuts for Ultra-High Vacuum
Screws for Medium to Low Vacuum
Titanium Screws for Vacuum
Regular Titanium Screws
Ceramic Screws and Nuts
Screws and Nuts with Special Surface Treatment
Screws and Nuts Made of Special Materials
A4 Vacuum Equipment
SMART CLUSTER(Compact waferTransfer System)
Extreme-High Vacuum System
Vacunm-Baking System
A5 Other accessories
Viewing Port for Ultra-High Vacuum
Barium Fluoride Special Viewing Port
CCD Camera "Vacuum Eye"(TM) for Ultra-High Vacuum
Ultra-High Vacuum Stage
Mineral Insulated Cable for Vacuum
Fine Adjustment Positioning Unit for Ultra-High Vacuum
Wrenchless Nuts
Vacuum Crimp Terminals
Shutter Mechanism for Ultra-High Vacuum
Reflection High Energy Electron Diffraction Device(RHEED)
Concentric Spherical Analyzer
Electron Beam Source and Photoelectron Analyzer
Vacuum-Readiness Machining Services
Vacuum-Baking Services
Vacuum Analysis Services
Manual XY Slit
Automatic XY Slit for Atmosphere
Automatic XY Slit for Vacuum
XY Slit Mechanism for High Vacuum
4-axis Goniometer for Ultra-High Vacuum
5-axis Goniometer for High Vacuum
6-axis Goniometer for Ultra-High Vacuum
Higher Harmonic Elimination Mirror Adjuster
In-situ Polarized Light Total Reflection Fluorescent XAFS Instrument
Small-Angle dispersion camera
Wide-Angle/Small-Angle Concurrent Observation Structure Evaluation Apparatus
Tune Measuring Instrument
Vacuum Dispersion Chamber
Beam Profile Monitor
Accelerator Vacuum Beam-Ducts
Projection X-ray microscope
Gravity Measuring Device
Atomic Fountain Standards Instrument
Room-Temperature Bonder
RHEED Built-in Surface Analysis System
Vacuum Environment Test System
Manipulator for Electron Microscope
Ultra Low Temperature Stage
Mirror Manipulator for Laser Beams
Aluminum Alloy Chamber
Copper Alloy Chamber
Stainless Steel Alloy Chamber
FED Evaluation Equipment
A Standard products Contents - A4 Vacuum Equipment
■Copper alloy Extreme-High Vacuum system
■ Low radiation rate and high conductivity.
■ Outgassing from the heat source was reduced to 1/100.
■ Super low Outgassing is achieved by special treatment TOMI polishing.
■ Ultra-High Vacuum of 10-9Pa level is obtained with low temper-ature baking at about 100℃.
■ In baking above 250℃, an Extreme-High Vacuum is easily obtained.
■ This technology controls Outgassing by adding certain improvement on the existing
 Chamber size  80mm cubic chamber
 Port size  ICF 070×6
 Ultimate Vacuum Pressure  10-9Pa level
(when connecting a turbo molecule pump 10-10Pa level)
 Leakage rate  Outside measurable limit
 Net weight  About 30kg
 Accessories  Low out gas mass spectrometer
 Extractor gauge
 NEG pump
 Special ion pump(Musashino Engineering Co.,Ltd.)
A custom manufactured apparatus is offered based on customer specifications.
  Copyright (C) 2003Musashino Engineering CO.,LTD. All Rights Reserved